The single wafer technology implemented in every SSEC wet processor provides benefits in yield, precision, and uniformity, and the lowest cost of ownership (COO). Systems are configured from off-the-shelf modules for an exact fit to user requirements.

SSEC’s single wafer processors enhance manufacturing and development with:

• High uniformity and high yields through PC program control of all process parameters;

• Patented processing tools, high efficiency robotics, and data logging and analysis;


• In-situ monitoring, resulting in per-wafer process control and reduced chemistry consumption;


• Up to 12 sealed, molded Halar chambers to accommodate complex, multi-step processes or high speed parallel processing;


• Shorter cycle times that reduce work-in-process inventory.

Single wafer processing helps users meet their processing goals, with the most precise results and lowest costs.