Clean/Strip
Reticle Final Cleaning
UV Laser Light Cleaning
Proximity and Contact Photomask Cleaning
Double-sided Incoming Glass Clean
Layer Clean
UV Laser Surface Conditioning Clean

Coat
Resist Coat/Bake Processing
Spin Resist Coat/Bake Processing
Spin Poly Coat/Bake Processing

Develop
PBS/Solvent Develop
Resist Develop
Poly/Solvent Develop

Etch
Chrome Etch
ITO Etch
Aluminum Etch
Gold Etch
Oxide Layer Etch