For higher volume production, SSEC 3404/6 systems can be built with up to six single panel processing modules. Systems may be configured for multi-step serial processing, or for parallel processing of up to 100 panels per hour. With molded processing modules for panels to 550 mm x 550 mm, this robotic-driven tool meets semiconductor standards for cleanliness and uniformity.

Each processing module is configurable for application-specific requirements, including clean, coat/bake/chill/develop clusters, wet etch, and strip, with up to six dispense arms and four chemical drains. Arms may be fitted with high velocity sprays, megasonic scrubs, PVA brush assemblies, chemistry application nozzles, and more. Each chamber is fully enclosed, and is backfilled with ULPA filtered air or inert gas. When equipped with a second PC, the system can be separate as two independent two-module systems, sharing a single handling robot.

The system includes onboard chemistry management, with recipe-driven, closed-loop controlled chemistry blending and true single wafer, on-the-fly temperature control. For many applications, in-situ, adaptive process control is provided by SSEC’s exclusive WaferChek™ system, which manages the wet chemistry processing by the optical properties of the wafer surface.

For spin coat/bake operations, the system is fitted with a closed cup coating system and sidewall EBR cleaning capabilities. Stackable hotplates/chill plates may be provided for long or multi-step baking, including inert gas or vapor processing.

SSEC’s Windows® based, object oriented software provides a convenient user interface and supports complete management of processing and data logging. 

SSEC 3400 systems are configured with one, two, or three, dual blade, high speed robotic handlers.  An edge grip flipping station is available for double-sided processing requirements. Vision processing, with closed loop control, supports safe, efficient handling for your valuable panels.  All systems are SEMI® S2-0703aE safety and S8-0705 ergonomic compliant, CE marked, and ETL listed.