The SSEC 3400 family of wet cleaners and processors implements single wafer technology in application-specific configurations for cleaning, coating, developing, etching, and solvent processing of flat panel displays and glass up to 500 mm x 500 mm in a completely digital processing environment. SSEC 3401/3 systems are fully automated, and designed for economical production requirements, with dry-in/dry-out performance for maximum operator safety per SEMI® standards. These compact, stacked chamber configurations incorporate one to three processing modules in a small, economical footprint. These systems are available in either bulkhead or ballroom styles, with air in the mini-environment processed by ULPA filtration. Throughput can reach or exceed 100 panels per hour.

Each processing module is configurable for application-specific requirements, including clean, coat/bake/chill/develop clusters, wet etch, and strip, with up to six dispense arms and four chemical drains. Arms may be fitted with high velocity sprays, megasonic scrubs, PVA brush assemblies, chemistry application nozzles, and more. Each chamber is fully enclosed, and is backfilled with ULPA filtered air or inert gas.

The system includes onboard chemistry management, with recipe-driven, closed-loop controlled chemistry blending and true single wafer, on-the-fly temperature control. For many applications, in-situ, adaptive process control is provided by SSEC’s exclusive WaferChek™ system, which manages the wet chemistry processing by the optical properties of the wafer surface.

For spin coat/bake operations, the system is fitted with a closed cup coating system and sidewall EBR cleaning capabilities. Stackable hotplates/chill plates may be provided for long or multi-step baking, including inert gas or vapor processing.

SSEC’s Windows® based, object oriented software provides a convenient user interface and supports complete management of processing and data logging. 

SSEC 3400 systems are configured with one, two, or three, dual blade, high speed robotic handlers.  An edge grip flipping station is available for double-sided processing requirements. Vision processing, with closed loop control, supports safe, efficient handling for your valuable panels.  All systems are SEMI® S2-0703aE safety and S8-0705 ergonomic compliant, CE marked, and ETL listed.