SSEC 3301/2 systems are fully automated, and are dry-in/-out for maximum operator safety with harsh chemistries. These systems may be built with up to two processing modules. They are available in either bulkhead or ballroom styles, with air in the mini-environment processed by ULPA filtration. Available onboard bulk chemical management and blending increase economy, allowing operation with chemistry diluted from bulk concentrate supplies. Wafers may be handled in cassettes per SEMI® ergonomic standards with horizontal cassette loaders, or SMIFs, or with standard 300 mm FOUP openers. Tooling supports wafers to 300 mm.

The molded Halar single wafer processing modules in SSEC 3300 systems are configurable with up to seven dispense arms and four chemical drains.  The dispense arms may be fitted with high velocity sprays, megasonic scrubs, PVA brush assemblies, chemistry application nozzles, and more. The system includes onboard chemistry management, with recipe-driven, closed-loop controlled chemistry blending and true single wafer, on-the-fly temperature control. For many applications, in-situ, adaptive process control is provided by SSEC’s exclusive WaferChek™ system, which manages the wet chemistry processing by the optical properties of the wafer surface.

The SSEC 3300 family of wet cleaners and processors implements single wafer technology in application-specific configurations for cleaning, coating, developing, etching, and solvent processing in a completely digital processing environment. The Windows®-based, object-oriented software provides a convenient user interface, and supports complete management of processing and data logging.

Processes may be serial, with wet wafer transfer, or in parallel, depending on the requirements. The robotic handling system provides up to four blades per handler. These blades can be used for carrying wet wafers between processing steps, or a blade can be dedicated to movement of finished, dry wafers. Edge grip handling with feedback sensors, vacuum paddles, wafer flipping/reversing, and vision processing all support the cleanest, most reliable individual handling of your valuable wafers.

SSEC 3300 single wafer systems are available from low volume to 200 wafers per hour. All systems are SEMI® S2-0703aE safety and S8-0705 ergonomic compliant, CE marked, and ETL listed.