Systems Configured to Your Product and Application

3450 Series Overview

For the emerging 450 mm Wafer Standard, SSEC's 3450 Series is the starting point for pilot production requirements for single wafer wet processes including single wafer wet cleans, strips and etch. SSEC 3450 series is configured with molded chambers and 100% servo driven robotics, specifically designed and operating daily for 450 mm wafers.

The SSEC 3450 features three processing stations and up to two FOUP loaders in a compact footprint. Processing modules including spin stations, Double-Sided brush boxes and sealed immersion stations

All systems are SEMI® S2-0706E safety and SEMI® S8-0705 ergonomic compliant, CE marked, and ETL listed.