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Clean/Strip

  • Reticle Final Cleaning
  • Proximity and Contact Photomask Cleaning
  • Double-sided Incoming Glass Clean

    Etch

  • Chrome Etch
  • ITO Etch
  • Aluminum Etch
  • Gold Etch
  • Oxide Layer Etch

Coat

  • Spin Resist Coat/Bake/Chill

Develop

  • Solvent Develop
  • Aqueous Develop
 
MODEL 3303/4
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MODEL 3401/3
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