SSEC wet cleaners and processors have been designed from the inside out with standard, off-the-shelf capabilities. This integrated technological approach enables a flexible platform which may be configured exactly to your process requirements, whether for complex, multi-step serial or parallel wet processing. This means you can have compact, economical solutions for the processes you need.

These systems are configured for capacity, number and type of modules, robotics, and tools, according to the material to be processed and size of the wafer or substrate, production volume, and process requirements. Bulk chemistry management and blending systems may be onboard or standalone, and are fully integrated into the control network.

SSEC 3300 Series—for Wafers to 300 mm

SSEC 3400 Series for Photomasks, FPDs, and Glass to 500 mm x 500 mm

SSEC 3800 Series — for Large FPDs to 2.2 m square

Chemistry Management Systems