With flexible plans that can be tailored to your production needs, SSEC supports its products throughout the world with 24/7 technical service assistance, on-site field service, and rapid spare parts access. Building upon a virtual machine on SSEC’s network and web portal, and accessing and utilizing advanced log files and diagnostics, SSEC support staff can rapidly identify and fix problems, whenever and wherever they occur. SSEC actively manages the time to response, time to resolution, and the quality of our response with feedback facilitated by a Customer Satisfaction Survey, so that we may continually improve our service.

SSEC SQL Front End

The SSEC Data Front End provides local and remote real-time monitoring of all data variables on the equipment. This includes heater temperatures, analog readings, sensors, fluid tank levels, and digital settings. The data can be correlated with system events to provide a complete picture of equipment performance during wafer processing.

System data and events are stored locally on the tool in a standard SQL database. All variables
are recorded at 1 second intervals. The SSEC Data Front End can operate locally on the tool, from
a nearby PC in the cleanroom, or remotely from an engineer’s desk. The tool can support simultaneous
SSEC Data Front End connections from multiple locations. In addition, a single PC can run multiple
Front End applications to connect to multiple tools.